The first functional test of the new INP magnetron sputtering reactor for the deposition of electroceramic thin films was carried out on 19 June 2020. In the reactor, a closed-field unbalanced magnetron sputtering technique can be used to deposit complex metal oxides with a perovskite structure (e.g. barium cerium zirconate) on the tubular substrates for solid-state ammonia synthesis (SSAS) that were developed at the Fraunhofer Institute for Ceramic Systems (IKTS).
